Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165896 | Substrate support and substrate processing apparatus | Akira Nagayama, Yasuharu Sasaki, Shin Yamaguchi | 2024-12-10 |
| 11521886 | Substrate processing apparatus and substrate support | Yasuharu Sasaki, Hiroki Kishi, Jisoo SUH | 2022-12-06 |
| 10825709 | Electrostatic chucking method and substrate processing apparatus | Yasuharu Sasaki, Hiroki Kishi, Jisoo SUH | 2020-11-03 |
| 10714370 | Mounting table and plasma processing apparatus | Taku Gohira, Toshiyuki MAKABE | 2020-07-14 |
| 10269607 | Electrostatic chucking method and substrate processing apparatus | Yasuharu Sasaki, Hiroki Kishi, Jisoo SUH | 2019-04-23 |