Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165893 | Substrate processing system and transfer method | Norihiko Amikura, Masatomo KITA, Shin Matsuura, Nobutaka SASAKI, Gyeong min PARK | 2024-12-10 |
| 10714370 | Mounting table and plasma processing apparatus | Taketoshi TOMIOKA, Taku Gohira | 2020-07-14 |
| 9721822 | Electrostatic chuck apparatus | Yasuharu Sasaki, Kenji Masuzawa, Mamoru Kosakai, Takashi Satou, Kazunori Ishimura +2 more | 2017-08-01 |
| 9410753 | Substrate temperature adjusting method and a method of changing the temperature control range of a heater in a substrate processing apparatus | Taketoshi Okajo | 2016-08-09 |
| 8981263 | Electrostatic chuck apparatus | Yasuharu Sasaki, Kenji Masuzawa, Mamoru Kosakai, Takashi Satou, Kazunori Ishimura +2 more | 2015-03-17 |