Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12180767 | Open/close control device, open/close control system, open/close control method, and program | Shinichi Endo, Yuta Hoshikawa | 2024-12-31 |
| 11970896 | Opening/closing control device and opening/closing control method | Shinichi Endo | 2024-04-30 |
| 9721822 | Electrostatic chuck apparatus | Yasuharu Sasaki, Toshiyuki MAKABE, Mamoru Kosakai, Takashi Satou, Kazunori Ishimura +2 more | 2017-08-01 |
| 8981263 | Electrostatic chuck apparatus | Yasuharu Sasaki, Toshiyuki MAKABE, Mamoru Kosakai, Takashi Satou, Kazunori Ishimura +2 more | 2015-03-17 |
| 8440050 | Plasma processing apparatus and method, and storage medium | Manabu Iwata, Hiroyuki Nakayama, Masanobu Honda | 2013-05-14 |
| 8303834 | Plasma processing apparatus and plasma etching method | Masanobu Honda, Hiroyuki Nakayama, Manabu Iwata, Manabu Sato, Kazuki Narishige | 2012-11-06 |