Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11501976 | Substrate processing method and substrate processing apparatus | Seiichi Watanabe, Xinhe Jerry Lim, Jianfeng Xu, Yi Hao Ng, Zhenkang Max Liang +10 more | 2022-11-15 |
| 9449838 | Semiconductor device manufacturing method | Kazuto Ogawa, Takanori Sato | 2016-09-20 |
| 9412617 | Plasma processing method and plasma processing apparatus | Takanori Sato, Manabu Sato | 2016-08-09 |
| 9384992 | Plasma processing method | Takanori Sato, Manabu Sato | 2016-07-05 |
| 9355861 | Semiconductor device manufacturing method and computer-readable storage medium | Manabu Sato, Takanori Sato | 2016-05-31 |
| 9337056 | Semiconductor device manufacturing method | Rui Takahashi, Ryuuu Ishita | 2016-05-10 |
| 9039913 | Semiconductor device manufacturing method | Kazuto Ogawa, Takanori Sato | 2015-05-26 |
| 8759227 | Method for processing a target object | Kazuo Shigeta | 2014-06-24 |
| 8735299 | Semiconductor device manufacturing method and computer-readable storage medium | Seiichi Watanabe, Manabu Sato, Takanori Sato, Takayuki Katsunuma | 2014-05-27 |
| 8518830 | Plasma etching method and storage medium | Yoshiki Igarashi | 2013-08-27 |
| 8303834 | Plasma processing apparatus and plasma etching method | Masanobu Honda, Kenji Masuzawa, Hiroyuki Nakayama, Manabu Iwata, Manabu Sato | 2012-11-06 |
| 8071473 | Semiconductor device manufacturing method and storage medium | Koichi Nagakura | 2011-12-06 |
| 7622393 | Method and apparatus for manufacturing a semiconductor device, control program thereof and computer-readable storage medium storing the control program | — | 2009-11-24 |