Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9786512 | Etching method | Yu Nagatomo, Daisuke Tamura, Kousuke KOIWA | 2017-10-10 |
| 9536707 | Etching method of multilayered film | Yusuke Saitoh | 2017-01-03 |
| 9337056 | Semiconductor device manufacturing method | Rui Takahashi, Kazuki Narishige | 2016-05-10 |
| 9263239 | Etching method of multilayered film | Yusuke Saitoh | 2016-02-16 |