Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11348819 | Electrostatic chuck device | Yuuki Kinpara, Ryuuji Hayahara, Hitoshi Kouno | 2022-05-31 |
| 10923381 | Electrostatic chuck device | Mamoru Kosakai, Yukio Miura, Keisuke Maeda, Hitoshi Kouno, Yuuki Kinpara +2 more | 2021-02-16 |
| 10502639 | Plate-shaped body for temperature measurement and temperature measuring apparatus provided with the same | Mamoru Kosakai, Takeshi Watanabe, Hitoshi Kouno, Ryuuji Hayahara | 2019-12-10 |
| 10475688 | Electrostatic chuck device, and semiconductor manufacturing device | Kazuto Ando, Kentaro Takahashi, Yuhki Kinpara, Shinichi Maeta, Mamoru Kosakai | 2019-11-12 |
| 9721822 | Electrostatic chuck apparatus | Yasuharu Sasaki, Kenji Masuzawa, Toshiyuki MAKABE, Mamoru Kosakai, Takashi Satou +2 more | 2017-08-01 |
| 9343346 | Electrostatic chuck apparatus | Mamoru Kosakai, Takashi Satou, Ryuuji Hayahara, Takeshi Watanabe, Yoshiaki Moriya +1 more | 2016-05-17 |
| 9269600 | Electrostatic chuck device | Yukio Miura, Mamoru Kosakai | 2016-02-23 |
| 9209061 | Electrostatic chuck device | Ryuuji Hayahara, Mamoru Kosakai | 2015-12-08 |
| 8981263 | Electrostatic chuck apparatus | Yasuharu Sasaki, Kenji Masuzawa, Toshiyuki MAKABE, Mamoru Kosakai, Takashi Satou +2 more | 2015-03-17 |
| 6730276 | Plastic film electrostatic adsorption apparatus and electrostatic adsorption method | Mamoru Kosakai, Teruyasu Fujita | 2004-05-04 |