Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11024528 | Electrostatic chuck device having focus ring | Yoshiaki Moriya, Keigo Maki, Hitoshi Kouno, Yuuki Kinpara | 2021-06-01 |
| 10475688 | Electrostatic chuck device, and semiconductor manufacturing device | Kazunori Ishimura, Kentaro Takahashi, Yuhki Kinpara, Shinichi Maeta, Mamoru Kosakai | 2019-11-12 |
| 10389278 | Electrostatic chuck device with multiple fine protrusions or multiple fine recesses | Yoshiaki Moriya | 2019-08-20 |
| 9776380 | Ceramic member | Shintaro Hayashi, Masayuki Ishizuka | 2017-10-03 |
| 9403722 | Sintered objects and processes for producing same | Shintaro Hayashi, Hirokuni Kugimoto, Masayuki Ishizuka | 2016-08-02 |
| 8358493 | Electrostatic chuck, production method of electrostatic chuck and electrostatic chuck device | Hironori Kugimoto, Yoshiaki Moriya | 2013-01-22 |
| 7289726 | Device for photographing provided with flash unit | Mitsuhiro Moriya | 2007-10-30 |