Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11348819 | Electrostatic chuck device | Yuuki Kinpara, Ryuuji Hayahara, Kazunori Ishimura | 2022-05-31 |
| 11024528 | Electrostatic chuck device having focus ring | Yoshiaki Moriya, Keigo Maki, Kazuto Ando, Yuuki Kinpara | 2021-06-01 |
| 10923381 | Electrostatic chuck device | Mamoru Kosakai, Yukio Miura, Kazunori Ishimura, Keisuke Maeda, Yuuki Kinpara +2 more | 2021-02-16 |
| 10502639 | Plate-shaped body for temperature measurement and temperature measuring apparatus provided with the same | Mamoru Kosakai, Kazunori Ishimura, Takeshi Watanabe, Ryuuji Hayahara | 2019-12-10 |
| 10262886 | Electrostatic chuck device | Kentaro Takahashi, Fumihiro Gobou | 2019-04-16 |
| 10153192 | Electrostatic chuck device | Shinichi Maeta, Yukio Miura, Mamoru Kosakai | 2018-12-11 |
| 10068790 | Electrostatic chuck device | Fumihiro Gobou | 2018-09-04 |
| 9721822 | Electrostatic chuck apparatus | Yasuharu Sasaki, Kenji Masuzawa, Toshiyuki MAKABE, Mamoru Kosakai, Takashi Satou +2 more | 2017-08-01 |
| 8981263 | Electrostatic chuck apparatus | Yasuharu Sasaki, Kenji Masuzawa, Toshiyuki MAKABE, Mamoru Kosakai, Takashi Satou +2 more | 2015-03-17 |
| 8130499 | Heat dissipating structure base board, module using heat dissipating structure base board, and method for manufacturing heat dissipating structure base board | Tohru Ohnishi, Toshiyuki Taniguchi, Koji Nakashima, Toshiyuki Nakata, Tsunetsugu Imanishi +1 more | 2012-03-06 |