Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11024528 | Electrostatic chuck device having focus ring | Yoshiaki Moriya, Hitoshi Kouno, Kazuto Ando, Yuuki Kinpara | 2021-06-01 |
| 8284538 | Electrostatic chuck device | Shinji Himori, Shoichiro Matsuyama, Atsushi Matsuura, Hiroshi Inazumachi, Mamoru Kosakai +1 more | 2012-10-09 |
| 8264813 | Electrostatic chuck device | Hiroshi Inazumachi, Mamoru Kosakai, Yukio Miura | 2012-09-11 |
| 8168452 | Method for manufacturing semiconductor device | Daisuke Ito | 2012-05-01 |
| 7678197 | Susceptor device | — | 2010-03-16 |
| 7619870 | Electrostatic chuck | Shinji Himori, Shoichiro Matsuyama, Atsushi Matsuura, Hiroshi Inazumachi, Mamoru Kosakai +1 more | 2009-11-17 |
| 6689984 | Susceptor with built-in electrode and manufacturing method therefor | — | 2004-02-10 |