Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8284538 | Electrostatic chuck device | Shinji Himori, Shoichiro Matsuyama, Atsushi Matsuura, Mamoru Kosakai, Yukio Miura +1 more | 2012-10-09 |
| 8264813 | Electrostatic chuck device | Mamoru Kosakai, Yukio Miura, Keigo Maki | 2012-09-11 |
| 7619870 | Electrostatic chuck | Shinji Himori, Shoichiro Matsuyama, Atsushi Matsuura, Mamoru Kosakai, Yukio Miura +1 more | 2009-11-17 |
| 6863281 | Chucking apparatus and production method for the same | Kazunori Endou | 2005-03-08 |
| 6838646 | Susceptor device | Mamoru Kosakai | 2005-01-04 |
| 6693789 | Susceptor and manufacturing method thereof | Takeshi Ootsuka, Takeshi Kawase | 2004-02-17 |