Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7175714 | Electrode-built-in susceptor and a manufacturing method therefor | Takeshi Ootsuka | 2007-02-13 |
| 6872908 | Susceptor with built-in electrode and manufacturing method therefor | Takeshi Ootsuka, Mamoru Kosakai | 2005-03-29 |
| 6863281 | Chucking apparatus and production method for the same | Hiroshi Inazumachi | 2005-03-08 |
| 6444957 | Heating apparatus | Takao Kitagawa, Masayuki Ishizuka, Masayuki Hashimoto, Tsuyoshi Nagata | 2002-09-03 |