Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12280578 | Method for repairing electrostatic chuck device | Keisuke Maeda | 2025-04-22 |
| 11471987 | Electrostatic chuck device and electrostatic chuck device manufacturing method | Keisuke Maeda, Masaki Ozaki, Masayuki Shiojiri, Takeshi Watanabe, Shinichi Maeta | 2022-10-18 |
| 11348819 | Electrostatic chuck device | Ryuuji Hayahara, Kazunori Ishimura, Hitoshi Kouno | 2022-05-31 |
| 11024528 | Electrostatic chuck device having focus ring | Yoshiaki Moriya, Keigo Maki, Hitoshi Kouno, Kazuto Ando | 2021-06-01 |
| 10923381 | Electrostatic chuck device | Mamoru Kosakai, Yukio Miura, Kazunori Ishimura, Keisuke Maeda, Hitoshi Kouno +2 more | 2021-02-16 |