Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11887877 | Electrostatic chuck device | Mamoru Kosakai, Keisuke Maeda | 2024-01-30 |
| 11848223 | Electrostatic chuck device and method for producing electrostatic chuck device | Hironori Kugimoto, Takeshi Watanabe, Kentaro Takahashi | 2023-12-19 |
| 11664261 | Electrostatic chuck device | Mamoru Kosakai, Keisuke Maeda | 2023-05-30 |
| 11471987 | Electrostatic chuck device and electrostatic chuck device manufacturing method | Keisuke Maeda, Masayuki Shiojiri, Takeshi Watanabe, Shinichi Maeta, Yuuki Kinpara | 2022-10-18 |
| 11328948 | Electrostatic chuck device and method of manufacturing electrostatic chuck device | Norito MORISHITA | 2022-05-10 |