Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424475 | Ceramic joined body, electrostatic chuck device, and method for producing ceramic joined body | Nobuhiro Hidaka, Yukio Miura, Jun Arikawa | 2025-09-23 |
| 11848223 | Electrostatic chuck device and method for producing electrostatic chuck device | Masaki Ozaki, Takeshi Watanabe, Kentaro Takahashi | 2023-12-19 |
| 11842914 | Composite sintered body, electrostatic chuck member, and electrostatic chuck device | Nobuhiro Hidaka | 2023-12-12 |
| 11837489 | Electrostatic chuck device and production method for electrostatic chuck device | Norito MORISHITA | 2023-12-05 |
| 11784079 | Composite sintered body, electrostatic chuck member, and electrostatic chuck device | Nobuhiro Hidaka | 2023-10-10 |
| 11551962 | Ceramic substrate and susceptor | Mamoru Kosakai, Nobuhiro Hidaka, Naoto Kimura | 2023-01-10 |
| 11387132 | Ceramic material and electrostatic chuck device | Yoshiki Yoshioka, Nobuhiro Hidaka | 2022-07-12 |
| 11107719 | Electrostatic chuck device and method for manufacturing electrostatic chuck device | Nobuhiro Hidaka, Mamoru Kosakai | 2021-08-31 |
| 10861730 | Electrostatic chuck device | — | 2020-12-08 |
| 10497599 | Corrosion-resistant member, member for electrostatic chuck, and process for producing corrosion-resistant member | Megumi Ootomo, Kentaro Takahashi, Nobuhiro Hidaka | 2019-12-03 |
| 8358493 | Electrostatic chuck, production method of electrostatic chuck and electrostatic chuck device | Kazuto Ando, Yoshiaki Moriya | 2013-01-22 |