Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11990362 | Composite sintered body, electrostatic chuck member, electrostatic chuck device, and method for manufacturing composite sintered body | Nobuhiro Hidaka, Jun Arikawa | 2024-05-21 |
| 10703677 | SiC sintered body, heater and method for producing SiC sintered body | Hiroaki Nagatomo, Kentaro Takahashi | 2020-07-07 |
| 10497599 | Corrosion-resistant member, member for electrostatic chuck, and process for producing corrosion-resistant member | Kentaro Takahashi, Nobuhiro Hidaka, Hironori Kugimoto | 2019-12-03 |
| 10189745 | Corrosion-resistant member and electrostatic chuck device | Kentaro Takahashi, Yoshiaki Moriya | 2019-01-29 |
| 10147629 | Electrostatic chuck device | Kentaro Takahashi | 2018-12-04 |
| 9378862 | Dielectric material | Yoshiki Yoshioka | 2016-06-28 |