Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424475 | Ceramic joined body, electrostatic chuck device, and method for producing ceramic joined body | Yukio Miura, Jun Arikawa, Hironori Kugimoto | 2025-09-23 |
| 12074050 | Composite sintered body, electrostatic chuck member, electrostatic chuck device, and method for producing composite sintered body | Naoto Kimura | 2024-08-27 |
| 11990362 | Composite sintered body, electrostatic chuck member, electrostatic chuck device, and method for manufacturing composite sintered body | Megumi Ootomo, Jun Arikawa | 2024-05-21 |
| 11842914 | Composite sintered body, electrostatic chuck member, and electrostatic chuck device | Hironori Kugimoto | 2023-12-12 |
| 11817339 | Electrostatic chuck device and method for manufacturing same | Naoto Kimura | 2023-11-14 |
| 11784079 | Composite sintered body, electrostatic chuck member, and electrostatic chuck device | Hironori Kugimoto | 2023-10-10 |
| 11551962 | Ceramic substrate and susceptor | Mamoru Kosakai, Naoto Kimura, Hironori Kugimoto | 2023-01-10 |
| 11387132 | Ceramic material and electrostatic chuck device | Yoshiki Yoshioka, Hironori Kugimoto | 2022-07-12 |
| 11345639 | Composite sintered body, electrostatic chuck member, electrostatic chuck device, and method for producing composite sintered body | Naoto Kimura | 2022-05-31 |
| 11107719 | Electrostatic chuck device and method for manufacturing electrostatic chuck device | Hironori Kugimoto, Mamoru Kosakai | 2021-08-31 |
| 10497599 | Corrosion-resistant member, member for electrostatic chuck, and process for producing corrosion-resistant member | Megumi Ootomo, Kentaro Takahashi, Hironori Kugimoto | 2019-12-03 |
| 8277581 | Nickel-iron-zinc alloy nanoparticles | Masayuki Ishizuka | 2012-10-02 |