Issued Patents All Time
Showing 1–25 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12354890 | Stage and plasma processing apparatus | Shota EZAKI, Masanori Takahashi | 2025-07-08 |
| 12293903 | Substrate support and plasma processing apparatus | Hajime Tamura, Yasuharu Sasaki, Shin Yamaguchi, Tsuguto Sugawara | 2025-05-06 |
| 11935729 | Substrate support and plasma processing apparatus | Hajime Tamura, Yasuharu Sasaki, Shin Yamaguchi, Tsuguto Sugawara | 2024-03-19 |
| 11837480 | Temperature controlling apparatus, temperature controlling method, and placing table | Kengo Kaneko | 2023-12-05 |
| 11791177 | Placing table including heat exchange medium path and substrate processing apparatus thereof | Masanori Takahashi, Shota EZAKI | 2023-10-17 |
| 11784066 | Stage and plasma processing apparatus | Shota EZAKI, Masanori Takahashi | 2023-10-10 |
| 11756806 | Heater power feeding mechanism | Dai KITAGAWA | 2023-09-12 |
| 11735392 | Plasma processing apparatus | Daisuke Hayashi, Kengo Kaneko | 2023-08-22 |
| 11705347 | Thermal regulator, substrate processing apparatus, and method of controlling temperature of stage | — | 2023-07-18 |
| 11694881 | Stage and plasma processing apparatus | Hiroki Endo, Naohiko Okunishi | 2023-07-04 |
| 11515194 | Substrate processing apparatus, substrate processing system, and substrate transporting method | — | 2022-11-29 |
| 11373884 | Placing table and plasma treatment apparatus | Dai KITAGAWA, Tsutomu Nagai, Daisuke Hayashi, Satoru TERUUCHI | 2022-06-28 |
| 11011347 | Plasma processing apparatus | Daisuke Hayashi, Kengo Kaneko | 2021-05-18 |
| 10923369 | Temperature controlling apparatus, temperature controlling method, and placing table | Kengo Kaneko | 2021-02-16 |
| 10886109 | Stage and plasma processing apparatus | Hiroki Endo, Naohiko Okunishi | 2021-01-05 |
| 10679869 | Placing table and plasma treatment apparatus | Dai KITAGAWA, Tsutomu Nagai, Daisuke Hayashi, Satoru TERUUCHI | 2020-06-09 |
| 10593522 | Electrostatic chuck, placing table and plasma processing apparatus | Dai KITAGAWA, Tomoyuki Takahashi | 2020-03-17 |
| 10515786 | Mounting table and plasma processing apparatus | Shingo KOIWA, Yasuhisa KUDO | 2019-12-24 |
| 10199246 | Temperature control mechanism, temperature control method and substrate processing apparatus | Shigeru Senzaki, Tomoyuki Takahashi, Dai KITAGAWA | 2019-02-05 |
| 7592261 | Method for suppressing charging of component in vacuum processing chamber of plasma processing system and plasma processing system | Takehiro Ueda, Kouki Suzuki | 2009-09-22 |
| 7203147 | Storage medium initialization method, and recording and reproducing method and apparatus | Takashi Kawakami, Toshihide Ooba | 2007-04-10 |
| 6393214 | Lens-fitted film unit, lens-fitted film unit package and method of manufacturing lens-fitted film unit package | Tetsufumi Takaba, Hiromi Nakanishi, Hiroshi Kibayashi | 2002-05-21 |
| 6226456 | Lens-fitted film unit with built-in strobe | Kiyoaki Hazama, Masaru Yamazaki, Hiroshi Yamaguchi, Kyoichi Itoh | 2001-05-01 |
| 6160788 | Data recording medium, recording and reproducing system and residual amount display method | Toshiharu Kobayashi, Chisato Kitsukawa | 2000-12-12 |
| 5600395 | One-time-use camera has driver for closing film cassette which cannot re-open closed cassette | Edward N. Balling, Masami Fujita, Kiyoaki Hazama | 1997-02-04 |