Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10515786 | Mounting table and plasma processing apparatus | Shingo KOIWA, Katsuyuki Koizumi | 2019-12-24 |
| 10340174 | Mounting table and plasma processing apparatus | Shin Yamaguchi, Daisuke Hayashi | 2019-07-02 |
| 8057633 | Post-etch treatment system for removing residue on a substrate | Yuji Tsukamoto, Thomas Hamelin | 2011-11-15 |
| 7560376 | Method for adjoining adjacent coatings on a processing element | Gary Escher, Mark Allen | 2009-07-14 |