Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9019078 | Surgical object tracking system | Niren Angle, Milan T. Makale, Wolfgang Wrasidlo, Sadik C. Esener | 2015-04-28 |
| 8409399 | Reduced maintenance chemical oxide removal (COR) processing system | Arthur Laflamme, Jay Wallace | 2013-04-02 |
| 8303715 | High throughput thermal treatment system and method of operating | Arthur Laflamme, Gregory R. Whyman | 2012-11-06 |
| 8303716 | High throughput processing system for chemical treatment and thermal treatment and method of operating | Jay Wallace | 2012-11-06 |
| 8057633 | Post-etch treatment system for removing residue on a substrate | Yuji Tsukamoto, Yasuhisa KUDO | 2011-11-15 |
| 8034176 | Gas distribution system for a post-etch treatment system | Yuji Tsukamoto, H. Steven Tomozawa, Sam Yong Kim | 2011-10-11 |
| 8007591 | Substrate holder having a fluid gap and method of fabricating the substrate holder | — | 2011-08-30 |
| 7964058 | Processing system and method for chemically treating a substrate | Jay Wallace, Arthur Laflamme | 2011-06-21 |
| 7651583 | Processing system and method for treating a substrate | Martin Kent, Arthur Laflamme, Jay Wallace | 2010-01-26 |
| 7462564 | Processing system and method for treating a substrate | Jay Wallace, Arthur Laflamme | 2008-12-09 |
| 7214274 | Method and apparatus for thermally insulating adjacent temperature controlled processing chambers | Jay Wallace | 2007-05-08 |
| 7079760 | Processing system and method for thermally treating a substrate | Jay Wallace, Arthur Laflamme | 2006-07-18 |
| 7029536 | Processing system and method for treating a substrate | Jay Wallace, Arthur Laflamme | 2006-04-18 |
| 6992892 | Method and apparatus for efficient temperature control using a contact volume | Paul Moroz | 2006-01-31 |
| 6951821 | Processing system and method for chemically treating a substrate | Jay Wallace, Arthur Laflamme | 2005-10-04 |