Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7998307 | Electron beam enhanced surface wave plasma source | Lee Chen | 2011-08-16 |
| 7938081 | Radial line slot antenna having a conductive layer | Lee Chen | 2011-05-10 |
| 7199327 | Method and system for arc suppression in a plasma processing system | Eric J. Strang | 2007-04-03 |
| 7186313 | Plasma chamber wall segment temperature control | Andrej Mitrovic, Maolin Long, Steven Fink, William Jones | 2007-03-06 |
| 7141763 | Method and apparatus for rapid temperature change and control | — | 2006-11-28 |
| 7109122 | Method and apparatus for reducing substrate charging damage | — | 2006-09-19 |
| 7073383 | Apparatus and method for determining clamping status of semiconductor wafer | William Jones, Andrej Mitrovic | 2006-07-11 |
| 6992892 | Method and apparatus for efficient temperature control using a contact volume | Thomas Hamelin | 2006-01-31 |
| 6887341 | Plasma processing apparatus for spatial control of dissociation and ionization | Eric J. Strang, Steven Fink | 2005-05-03 |
| 6868800 | Branching RF antennas and plasma processing apparatus | — | 2005-03-22 |
| 6674241 | Plasma processing apparatus and method of controlling chemistry | Eric J. Strang | 2004-01-06 |