Issued Patents All Time
Showing 25 most recent of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12158374 | Time-resolved OES data collection | Sergey Voronin, Blaze Messer, Yan Chen, Joel Ng, Ashawaraya Shalini +2 more | 2024-12-03 |
| 8296687 | System and method for using first-principles simulation to analyze a process performed by a semiconductor processing tool | Eric J. Strang | 2012-10-23 |
| 8073667 | System and method for using first-principles simulation to control a semiconductor manufacturing process | Eric J. Strang | 2011-12-06 |
| 8050900 | System and method for using first-principles simulation to provide virtual sensors that facilitate a semiconductor manufacturing process | Eric J. Strang | 2011-11-01 |
| 8036869 | System and method for using first-principles simulation to control a semiconductor manufacturing process via a simulation result or a derived empirical model | Eric J. Strang | 2011-10-11 |
| 8032348 | System and method for using first-principles simulation to facilitate a semiconductor manufacturing process | Eric J. Strang | 2011-10-04 |
| 8014991 | System and method for using first-principles simulation to characterize a semiconductor manufacturing process | Eric J. Strang | 2011-09-06 |
| 7789963 | Chuck pedestal shield | Steven Fink | 2010-09-07 |
| 7591923 | Apparatus and method for use of optical system with a plasma processing system | Audunn Ludviksson | 2009-09-22 |
| 7353141 | Method and system for monitoring component consumption | Eric J. Strang | 2008-04-01 |
| 7241397 | Honeycomb optical window deposition shield and method for a plasma processing system | Steven Fink, Paula Calabrese | 2007-07-10 |
| 7233878 | Method and system for monitoring component consumption | Eric J. Strang | 2007-06-19 |
| 7208067 | Method and system for monitoring RF impedance to determine conditions of a wafer on an electrostatic chuck | — | 2007-04-24 |
| 7186313 | Plasma chamber wall segment temperature control | Maolin Long, Paul Moroz, Steven Fink, William Jones | 2007-03-06 |
| 7164236 | Method and apparatus for improved plasma processing uniformity | Eric J. Strang, Murray D. Sirkis, Bill Quon, Richard Parsons, Yuji Tsukamoto | 2007-01-16 |
| 7109788 | Apparatus and method of improving impedance matching between an RF signal and a multi- segmented electrode | Jovan Jevtic | 2006-09-19 |
| 7073383 | Apparatus and method for determining clamping status of semiconductor wafer | William Jones, Paul Moroz | 2006-07-11 |
| 7075031 | Method of and structure for controlling electrode temperature | Eric J. Strang, Jim Fordemwalt, Wayne Johnson | 2006-07-11 |
| 7020583 | Method and apparatus for determining chemistry of part's residual contamination | Paula Calabrese | 2006-03-28 |
| 7015414 | Method and apparatus for determining plasma impedance | — | 2006-03-21 |
| 6965287 | Low reflection microwave window | — | 2005-11-15 |
| 6962664 | Controlled method for segmented electrode apparatus and method for plasma processing | — | 2005-11-08 |
| 6958484 | Method and apparatus for 2-d spatially resolved optical emission and absorption spectroscopy | — | 2005-10-25 |
| 6917204 | Addition of power at selected harmonics of plasma processor drive frequency | Jovan Jevtic, Richard Parsons, Murray D. Sirkis | 2005-07-12 |
| 6899527 | Closed-drift hall effect plasma vacuum pump for process reactors | Bill Quon, Samuel Antley | 2005-05-31 |