Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7164236 | Method and apparatus for improved plasma processing uniformity | Andrej Mitrovic, Eric J. Strang, Bill Quon, Richard Parsons, Yuji Tsukamoto | 2007-01-16 |
| 6917204 | Addition of power at selected harmonics of plasma processor drive frequency | Andrej Mitrovic, Jovan Jevtic, Richard Parsons | 2005-07-12 |
| 6891124 | Method of wafer band-edge measurement using transmission spectroscopy and a process for controlling the temperature uniformity of a wafer | Medona B. Denton, Wayne Johnson | 2005-05-10 |
| 6861844 | Electron density measurement and plasma process control system using changes in the resonant frequency of an open resonator containing the plasma | Joseph T. Verdeyen, Wayne Johnson | 2005-03-01 |
| 6799532 | Stabilized oscillator circuit for plasma density measurement | Joseph T. Verdeyen | 2004-10-05 |
| 6753498 | Automated electrode replacement apparatus for a plasma processing system | Eric J. Strang, Yu Wang Bibby, John Cronin | 2004-06-22 |
| 6741944 | Electron density measurement and plasma process control system using a microwave oscillator locked to an open resonator containing the plasma | Joseph T. Verdeyen, Wayne Johnson | 2004-05-25 |
| 6713969 | Method and apparatus for determination and control of plasma state | Wayne Johnson, Andrej Mitrovic, Eric J. Strang | 2004-03-30 |
| 6646386 | Stabilized oscillator circuit for plasma density measurement | Joseph T. Verdeyen | 2003-11-11 |
| 6573731 | Electron density measurement and control system using plasma-induced changes in the frequency of a microwave oscillator | Joseph T. Verdeyen, Wayne Johnson | 2003-06-03 |
| 5631685 | Apparatus and method for drying ink deposited by ink jet printing | Arthur M. Gooray, Kenneth C. Peter | 1997-05-20 |
| 4714810 | Means and methods for heating semiconductor ribbons and wafers with microwvaes | — | 1987-12-22 |