Issued Patents All Time
Showing 25 most recent of 68 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10680621 | Phase stabilization for a frequency multiplier | Reto Zingg, Victor M. Grothen, Lucia Cascio, Hsiang-Yi Chung | 2020-06-09 |
| 10589354 | Systems and methods for depositing charged metal droplets onto a workpiece | Lawrence E. Murr, Mike Halpin | 2020-03-17 |
| 10579574 | Instrumentation chassis with high speed bridge board | Victor M. Grothen, James David Lusk | 2020-03-03 |
| 10580871 | Nucleation layer for growth of III-nitride structures | Oleg Laboutin, Chen-Kai Kao, Chien-Fong Lo, Hugues Marchand | 2020-03-03 |
| 9917156 | Nucleation layer for growth of III-nitride structures | Oleg Laboutin, Chen-Kai Kao, Chien-Fong Lo, Hugues Marchand | 2018-03-13 |
| 9605238 | Photo-bioreactor system and method for production of bio-materials | Steven Fink, Roxanne E. Abul-Hal, N. Alan Abul-Haj | 2017-03-28 |
| 9587211 | Photo-bioreactor system and method | Steven Fink | 2017-03-07 |
| 9076812 | HEMT structure with iron-doping-stop component and methods of forming | Oleg Laboutin, Yu Cao | 2015-07-07 |
| 7462335 | Optical monitoring and control system and method for plasma reactors | Lianjun Liu | 2008-12-09 |
| RE40195 | Large area plasma source | — | 2008-04-01 |
| 7340472 | Organizing and storing hierarchical data in a database having dual structures | Eric J. Makus, Robert L. Usibelli, Sean M. Usibelli, Edwin Thorne, III | 2008-03-04 |
| 7311782 | Apparatus for active temperature control of susceptors | Eric J. Strang | 2007-12-25 |
| 7285758 | Rapid thermal processing lamp and method for manufacturing the same | — | 2007-10-23 |
| 7234862 | Apparatus for measuring temperatures of a wafer using specular reflection spectroscopy | Shane R. Johnson, Yong-Hang Zhang | 2007-06-26 |
| 7166233 | Pulsed plasma processing method and apparatus | Eric J. Strang | 2007-01-23 |
| 7102292 | Method and device for removing harmonics in semiconductor plasma processing systems | Richard Parsons | 2006-09-05 |
| 7091503 | Measuring plasma uniformity in-situ at wafer level | Maolin Long | 2006-08-15 |
| 7075031 | Method of and structure for controlling electrode temperature | Eric J. Strang, Andrej Mitrovic, Jim Fordemwalt | 2006-07-11 |
| 7066703 | Chuck transport method and system | — | 2006-06-27 |
| 7030045 | Method of fabricating oxides with low defect densities | — | 2006-04-18 |
| 7019253 | Electrically controlled plasma uniformity in a high density plasma source | Thomas Windhorn, Eric J. Strang | 2006-03-28 |
| 7018553 | Optical monitoring and control system and method for plasma reactors | Lianjun Liu | 2006-03-28 |
| 6979954 | Inter-stage plasma source | Bill Quon | 2005-12-27 |
| 6960887 | Method and apparatus for tuning a plasma reactor chamber | Eric J. Strang, Robert Hostetler, Steven Fink | 2005-11-01 |
| 6949722 | Method and apparatus for active temperature control of susceptors | Eric J. Strang | 2005-09-27 |