Issued Patents All Time
Showing 26–50 of 68 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6913703 | Method of adjusting the thickness of an electrode in a plasma processing system | Eric J. Strang, Thomas F. A. Bibby | 2005-07-05 |
| 6891124 | Method of wafer band-edge measurement using transmission spectroscopy and a process for controlling the temperature uniformity of a wafer | Medona B. Denton, Murray D. Sirkis | 2005-05-10 |
| 6863020 | Segmented electrode apparatus for plasma processing | Andrej Mitrovic | 2005-03-08 |
| 6861844 | Electron density measurement and plasma process control system using changes in the resonant frequency of an open resonator containing the plasma | Joseph T. Verdeyen, Murray D. Sirkis | 2005-03-01 |
| 6825090 | Fluid dielectric variable capacitor | — | 2004-11-30 |
| 6824363 | Linear inductive plasma pump for process reactors | Andrej Mitrovic | 2004-11-30 |
| 6819053 | Hall effect ion source at high current density | — | 2004-11-16 |
| 6811611 | Esrf source for ion plating epitaxial deposition | — | 2004-11-02 |
| 6812646 | Method and device for attenuating harmonics in semiconductor plasma processing systems | Thomas Windhorn, Andrej Mitrovic | 2004-11-02 |
| 6806650 | Structure and the method for measuring the spectral content of an electric field as a function of position inside a plasma | Thomas Windhorn | 2004-10-19 |
| 6790487 | Active control of electron temperature in an electrostatically shielded radio frequency plasma source | — | 2004-09-14 |
| 6767698 | High speed stripping for damaged photoresist | — | 2004-07-27 |
| 6758948 | Method and apparatus for depositing films | — | 2004-07-06 |
| 6757673 | Displaying hierarchial relationship of data accessed via subject index | Eric J. Makus, Robert L. Usibelli, Sean M. Usibelli, Edwin Thorne, III | 2004-06-29 |
| 6740842 | Radio frequency power source for generating an inductively coupled plasma | Leonard G. West | 2004-05-25 |
| 6740853 | Multi-zone resistance heater | Eric J. Strang | 2004-05-25 |
| 6741944 | Electron density measurement and plasma process control system using a microwave oscillator locked to an open resonator containing the plasma | Joseph T. Verdeyen, Murray D. Sirkis | 2004-05-25 |
| 6729850 | Applied plasma duct system | Raphael A. Dandl, Bill Quon, Samuel Antley, Andrej Mitrovic | 2004-05-04 |
| 6713969 | Method and apparatus for determination and control of plasma state | Murray D. Sirkis, Andrej Mitrovic, Eric J. Strang | 2004-03-30 |
| 6690568 | Fluid dielectric variable capacitor | — | 2004-02-10 |
| 6630364 | System for automatic control of the wall bombardment to control wall deposition | — | 2003-10-07 |
| 6573731 | Electron density measurement and control system using plasma-induced changes in the frequency of a microwave oscillator | Joseph T. Verdeyen, Murray D. Sirkis | 2003-06-03 |
| 6559601 | Plasma vacuum pump | Raphael A. Dandl, Gareth Guest | 2003-05-06 |
| 6535785 | System and method for monitoring and controlling gas plasma processes | Richard Parsons | 2003-03-18 |
| 6530342 | Large area plasma source | — | 2003-03-11 |