Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10147613 | Neutral beam etching of Cu-containing layers in an organic compound gas environment | Lee Chen | 2018-12-04 |
| 8974868 | Post deposition plasma cleaning system and method | Tadahiro Ishizaka | 2015-03-10 |
| 7781340 | Method and system for etching high-k dielectric materials | Lee Chen | 2010-08-24 |
| 7631518 | Glass powders, methods for producing glass powders and devices fabricated from same | Toivo T. Kodas, Mark J. Hampden-Smith, James Caruso, Quint H. Powell | 2009-12-15 |
| 7591923 | Apparatus and method for use of optical system with a plasma processing system | Andrej Mitrovic | 2009-09-22 |
| 7553427 | Plasma etching of Cu-containing layers | Lee Chen | 2009-06-30 |
| 7355171 | Method and apparatus for process monitoring and control | — | 2008-04-08 |
| 7214327 | Anisotropic dry etching of Cu-containing layers | Lee Chen | 2007-05-08 |
| 7202169 | Method and system for etching high-k dielectric materials | Lee Chen | 2007-04-10 |
| 7102132 | Process monitoring using infrared optical diagnostics | — | 2006-09-05 |
| 7064812 | Method of using a sensor gas to determine erosion level of consumable system components | Steven Fink | 2006-06-20 |
| 6894769 | Monitoring erosion of system components by optical emission | Eric J. Strang | 2005-05-17 |
| 6866929 | Glass powders, methods for producing glass powders and devices fabricated from same | Toivo T. Kodas, Mark J. Hampden-Smith, James Caruso, Quint H. Powell | 2005-03-15 |
| 6806949 | Monitoring material buildup on system components by optical emission | Eric J. Strang | 2004-10-19 |
| 6586330 | Method for depositing conformal nitrified tantalum silicide films by thermal CVD | Joseph T. Hillman | 2003-07-01 |
| 6360562 | Methods for producing glass powders | Toivo T. Kodas, Mark J. Hampden-Smith, James Caruso, Quint H. Powell | 2002-03-26 |