Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12362158 | Method for OES data collection and endpoint detection | Sergey Voronin, Blaze Messer, Yan Chen, Ashawaraya Shalini, Ying Zhu +1 more | 2025-07-15 |
| 12306044 | Optical emission spectroscopy for advanced process characterization | Sergey Voronin, Blaze Messer, Yan Chen, Ashawaraya Shalini, Ying Zhu +1 more | 2025-05-20 |
| 12158374 | Time-resolved OES data collection | Sergey Voronin, Andrej Mitrovic, Blaze Messer, Yan Chen, Ashawaraya Shalini +2 more | 2024-12-03 |
| 10692705 | Advanced optical sensor and method for detecting an optical event in a light emission signal in a plasma chamber | Mihail Mihaylov, Xinkang Tian, Ching-Ling Meng, Jason Ferns, Badru D. Hyatt +2 more | 2020-06-23 |
| 7251036 | Beam splitter/combiner for optical metrology tool | James Hendrix, David Y. Wang, Michael Ellison | 2007-07-31 |
| 7154607 | Flat spectrum illumination source for optical metrology | James Hendrix, David Y. Wang, David M. Aikens, Lawrence D. Rotter | 2006-12-26 |
| 7027158 | Beam splitter/combiner for optical meterology tool | James Hendrix, David Y. Wang, Michael Ellison | 2006-04-11 |