Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12276759 | LiDAR systems and methods for focusing on ranges of interest | Rui Zhang, Yimin Li, Junwei Bao | 2025-04-15 |
| 11860313 | LiDAR systems and methods for focusing on ranges of interest | Rui Zhang, Yimin Li, Junwei Bao | 2024-01-02 |
| 11675053 | LiDAR systems and methods for focusing on ranges of interest | Rui Zhang, Yimin Li, Junwei Bao | 2023-06-13 |
| 10692705 | Advanced optical sensor and method for detecting an optical event in a light emission signal in a plasma chamber | Mihail Mihaylov, Xinkang Tian, Ching-Ling Meng, Joel Ng, Badru D. Hyatt +2 more | 2020-06-23 |
| 10453653 | Endpoint detection algorithm for atomic layer etching (ALE) | Yan Chen, Xinkang Tian | 2019-10-22 |
| 8666703 | Method for automated determination of an optimally parameterized scatterometry model | John J. Hench, Serguei Komarov, Thaddeus Gerard Dziura | 2014-03-04 |
| 7395132 | Optical metrology model optimization for process control | Daniel Prager, Lawrence Lane, Dan Engelhard | 2008-07-01 |
| 7221989 | Optical metrology model optimization for process control | Dan Prager, Lawrence Lane, Dan Engelhard | 2007-05-22 |
| 7065423 | Optical metrology model optimization for process control | Dan Prager, Lawrence Lane, Dan Engelhard | 2006-06-20 |