Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10002804 | Method of endpoint detection of plasma etching process using multivariate analysis | Yan Chen, Vi Vuong | 2018-06-19 |
| 9330990 | Method of endpoint detection of plasma etching process using multivariate analysis | Yan Chen, Vi Vuong | 2016-05-03 |
| 8666703 | Method for automated determination of an optimally parameterized scatterometry model | Jason Ferns, John J. Hench, Thaddeus Gerard Dziura | 2014-03-04 |