| 8532796 |
Contact processing using multi-input/multi-output (MIMO) models |
Merritt Funk, Peter Biolsi, Ryukichi Shimizu |
2013-09-10 |
| 8501628 |
Differential metal gate etching process |
Vinh Luong, Hiroyuki Takahashi, Akiteru Ko, Asao Yamashita, Vaidya Bharadwaj +1 more |
2013-08-06 |
| 8183062 |
Creating metal gate structures using Lithography-Etch-Lithography-Etch (LELE) processing sequences |
Merritt Funk, Radha Sundararajan, Asao Yamashita |
2012-05-22 |
| 8019458 |
Creating multi-layer/multi-input/multi-output (MLMIMO) models for metal-gate structures |
Merritt Funk, Radha Sundararajan, Asao Yamashita, Hyung Joo Lee |
2011-09-13 |
| 7967995 |
Multi-layer/multi-input/multi-output (MLMIMO) models and method for using |
Merritt Funk, Radha Sundararajan, Hyung Joo Lee, Asao Yamashita |
2011-06-28 |
| 7939450 |
Method and apparatus for spacer-optimization (S-O) |
Asao Yamashita, Merritt Funk, Lee Chen, Radha Sundararajan |
2011-05-10 |
| 7899637 |
Method and apparatus for creating a gate optimization evaluation library |
Asao Yamashita, Merritt Funk, Lee Chen, Radha Sundararajan |
2011-03-01 |
| 7894927 |
Using Multi-Layer/Multi-Input/Multi-Output (MLMIMO) models for metal-gate structures |
Merritt Funk, Radha Sundararajan, Asao Yamashita, Hyung Joo Lee |
2011-02-22 |
| 7765077 |
Method and apparatus for creating a Spacer-Optimization (S-O) library |
Asao Yamashita, Merritt Funk, Lee Chen, Radha Sundaranajan |
2010-07-27 |
| 7713758 |
Method and apparatus for optimizing a gate channel |
Asao Yamashita, Merritt Funk, Lee Chen, Radha Sundararajan |
2010-05-11 |
| 7567700 |
Dynamic metrology sampling with wafer uniformity control |
Merritt Funk, Radha Sundararajan, Wesley C. Natzle |
2009-07-28 |
| 7542859 |
Creating a virtual profile library |
Merritt Funk |
2009-06-02 |
| 7502660 |
Feature dimension deviation correction system, method and program product |
David V. Horak, Wesley C. Natzle, Merritt Funk, Kevin Lally |
2009-03-10 |
| 7502709 |
Dynamic metrology sampling for a dual damascene process |
Merritt Funk, Radha Sundararajan, Wesley C. Natzle |
2009-03-10 |
| 7487053 |
Refining a virtual profile library |
Merritt Funk |
2009-02-03 |
| 7395132 |
Optical metrology model optimization for process control |
Jason Ferns, Lawrence Lane, Dan Engelhard |
2008-07-01 |
| 7328418 |
Iso/nested control for soft mask processing |
Asao Yamashita, Merritt Funk |
2008-02-05 |
| 7305322 |
Using a virtual profile library |
Merritt Funk |
2007-12-04 |
| 7289864 |
Feature dimension deviation correction system, method and program product |
David V. Horak, Wesley C. Natzle, Merritt Funk, Kevin Lally |
2007-10-30 |
| 7209798 |
Iso/nested cascading trim control with model feedback updates |
Asao Yamashita, Merritt Funk |
2007-04-24 |
| 7126700 |
Parametric optimization of optical metrology model |
Junwei Bao, Vi Vuong, Manuel Madriaga |
2006-10-24 |
