Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8532796 | Contact processing using multi-input/multi-output (MIMO) models | Merritt Funk, Peter Biolsi, Ryukichi Shimizu | 2013-09-10 |
| 8501628 | Differential metal gate etching process | Vinh Luong, Hiroyuki Takahashi, Akiteru Ko, Asao Yamashita, Vaidya Bharadwaj +1 more | 2013-08-06 |
| 8183062 | Creating metal gate structures using Lithography-Etch-Lithography-Etch (LELE) processing sequences | Merritt Funk, Radha Sundararajan, Asao Yamashita | 2012-05-22 |
| 8019458 | Creating multi-layer/multi-input/multi-output (MLMIMO) models for metal-gate structures | Merritt Funk, Radha Sundararajan, Asao Yamashita, Hyung Joo Lee | 2011-09-13 |
| 7967995 | Multi-layer/multi-input/multi-output (MLMIMO) models and method for using | Merritt Funk, Radha Sundararajan, Hyung Joo Lee, Asao Yamashita | 2011-06-28 |
| 7939450 | Method and apparatus for spacer-optimization (S-O) | Asao Yamashita, Merritt Funk, Lee Chen, Radha Sundararajan | 2011-05-10 |
| 7899637 | Method and apparatus for creating a gate optimization evaluation library | Asao Yamashita, Merritt Funk, Lee Chen, Radha Sundararajan | 2011-03-01 |
| 7894927 | Using Multi-Layer/Multi-Input/Multi-Output (MLMIMO) models for metal-gate structures | Merritt Funk, Radha Sundararajan, Asao Yamashita, Hyung Joo Lee | 2011-02-22 |
| 7765077 | Method and apparatus for creating a Spacer-Optimization (S-O) library | Asao Yamashita, Merritt Funk, Lee Chen, Radha Sundaranajan | 2010-07-27 |
| 7713758 | Method and apparatus for optimizing a gate channel | Asao Yamashita, Merritt Funk, Lee Chen, Radha Sundararajan | 2010-05-11 |
| 7567700 | Dynamic metrology sampling with wafer uniformity control | Merritt Funk, Radha Sundararajan, Wesley C. Natzle | 2009-07-28 |
| 7542859 | Creating a virtual profile library | Merritt Funk | 2009-06-02 |
| 7502660 | Feature dimension deviation correction system, method and program product | David V. Horak, Wesley C. Natzle, Merritt Funk, Kevin Lally | 2009-03-10 |
| 7502709 | Dynamic metrology sampling for a dual damascene process | Merritt Funk, Radha Sundararajan, Wesley C. Natzle | 2009-03-10 |
| 7487053 | Refining a virtual profile library | Merritt Funk | 2009-02-03 |
| 7395132 | Optical metrology model optimization for process control | Jason Ferns, Lawrence Lane, Dan Engelhard | 2008-07-01 |
| 7328418 | Iso/nested control for soft mask processing | Asao Yamashita, Merritt Funk | 2008-02-05 |
| 7305322 | Using a virtual profile library | Merritt Funk | 2007-12-04 |
| 7289864 | Feature dimension deviation correction system, method and program product | David V. Horak, Wesley C. Natzle, Merritt Funk, Kevin Lally | 2007-10-30 |
| 7209798 | Iso/nested cascading trim control with model feedback updates | Asao Yamashita, Merritt Funk | 2007-04-24 |
| 7126700 | Parametric optimization of optical metrology model | Junwei Bao, Vi Vuong, Manuel Madriaga | 2006-10-24 |