Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9279184 | Method of forming a pattern and substrate processing system | Kazuhiro Kubota | 2016-03-08 |
| 8532796 | Contact processing using multi-input/multi-output (MIMO) models | Daniel Prager, Merritt Funk, Peter Biolsi | 2013-09-10 |
| 8263498 | Semiconductor device fabricating method, plasma processing system and storage medium | Akihiro Kikuchi, Toshihiko Shindo | 2012-09-11 |