Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11163144 | Focusing of optical devices | Wojciech Jan Walecki, Jae-myung Ryu | 2021-11-02 |
| 10935777 | Focusing of optical devices | Wojciech Jan Walecki, Jae-myung Ryu | 2021-03-02 |
| 10837902 | Optical sensor for phase determination | Ivan Maleev, Hanyou Chu, Ching-Ling Meng, Qionglin Gao, Yan Chen +1 more | 2020-11-17 |
| 10692705 | Advanced optical sensor and method for detecting an optical event in a light emission signal in a plasma chamber | Xinkang Tian, Ching-Ling Meng, Jason Ferns, Joel Ng, Badru D. Hyatt +2 more | 2020-06-23 |
| 10473525 | Spatially resolved optical emission spectroscopy (OES) in plasma processing | Ching-Ling Meng, Holger Tuitje, Yan Chen | 2019-11-12 |
| 10416430 | Focusing of optical devices | Wojciech Jan Walecki, Jae-myung Ryu | 2019-09-17 |
| 9970818 | Spatially resolved optical emission spectroscopy (OES) in plasma processing | Junwei Bao, Ching-Ling Meng, Holger Tuitje, Yan Chen, Zheng Yan +2 more | 2018-05-15 |
| 9846088 | Differential acoustic time of flight measurement of temperature of semiconductor substrates | Jun Pei, Junwei Bao, Holger Tuitje, Ching-Ling Meng | 2017-12-19 |
| 9059038 | System for in-situ film stack measurement during etching and etch control method | Shifang Li, Junwei Bao, Hanyou Chu, Wen Jin, Ching-Ling Meng +4 more | 2015-06-16 |
| 7789541 | Method and system for lamp temperature control in optical metrology | Ching-Ling Meng | 2010-09-07 |
| 7761178 | Automated process control using an optical metrology system optimized with design goals | Xinkang Tian, Manuel Madriaga, Ching-Ling Meng | 2010-07-20 |
| 7761250 | Optical metrology system optimized with design goals | Xinkang Tian, Manuel Madriaga, Ching-Ling Meng | 2010-07-20 |
| 7595869 | Optical metrology system optimized with a plurality of design goals | Xinkang Tian, Manuel Madriaga, Ching-Ling Meng | 2009-09-29 |
| 7595471 | Auto focusing of a workpiece using an array detector each with a detector identification | — | 2009-09-29 |
| 6867870 | Digital detector data communication in an optical metrology tool | Dale Lindseth | 2005-03-15 |