Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12360463 | Fiber bundle based optical spot size selector | — | 2025-07-15 |
| 11989876 | Method and apparatus for inspecting pattern collapse defects | Shin-Yee Lu | 2024-05-21 |
| 11676266 | Method and apparatus for inspecting pattern collapse defects | Shin-Yee Lu | 2023-06-13 |
| 11664283 | Raman sensor for supercritical fluids metrology | — | 2023-05-30 |
| 11415725 | System, method and apparatus for polarization control | Donald Pettibone | 2022-08-16 |
| 11385154 | Apparatus and method for monitoring and measuring properties of polymers in solutions | Ching-Ling Meng | 2022-07-12 |
| 10921488 | System, method and apparatus for polarization control | Donald Pettibone | 2021-02-16 |
| 10837902 | Optical sensor for phase determination | Mihail Mihaylov, Hanyou Chu, Ching-Ling Meng, Qionglin Gao, Yan Chen +1 more | 2020-11-17 |
| 10564714 | Systems and methods for biomechanically-based eye signals for interacting with real and virtual objects | Lewis James Marggraff, Nelson George Publicover, Spencer James Connaughton, Nathan Lord, Peter Milford | 2020-02-18 |
| 10488348 | Wafer inspection | Anatoly Romanovsky, Daniel Kavaldjiev, Yury Yuditsky, Dirk Woll, Stephen Biellak +2 more | 2019-11-26 |
| 9995850 | System, method and apparatus for polarization control | Donald Pettibone | 2018-06-12 |
| 9915622 | Wafer inspection | Anatoly Romanovsky, Daniel Kavaldjiev, Yury Yuditsky, Dirk Woll, Stephen Biellak +2 more | 2018-03-13 |
| 9891177 | TDI sensor in a darkfield system | Jijen Vazhaeparambil, Guoheng Zhao, Daniel Kavaldjiev, Anatoly Romanovsky, Christian Wolters +5 more | 2018-02-13 |
| 9494531 | Multi-spot illumination for improved detection sensitivity | Yung-Ho Alex Chuang, Xiaoxu Lu, John Fielden | 2016-11-15 |
| 9377416 | Wafer edge detection and inspection | Venkata Raghavaiah Chowdhary Kode | 2016-06-28 |
| 9279774 | Wafer inspection | Anatoly Romanovsky, Daniel Kavaldjiev, Yury Yuditsky, Dirk Woll, Stephen Biellak +2 more | 2016-03-08 |
| 9182341 | Optical surface scanning systems and methods | — | 2015-11-10 |
| 9076639 | Transmissive-reflective photocathode | — | 2015-07-07 |
| 8502977 | Angular resolved spectroscopic scatterometer | — | 2013-08-06 |