| 10429719 |
183 nm CW laser and inspection system |
Yung-Ho Alex Chuang, Baigang Zhang, John Fielden, Vladimir Dribinski |
2019-10-01 |
| 10175555 |
183 nm CW laser and inspection system |
Yung-Ho Alex Chuang, Baigang Zhang, John Fielden, Vladimir Dribinski |
2019-01-08 |
| 10044164 |
Laser repetition rate multiplier and flat-top beam profile generators using mirrors and/or prisms |
Yung-Ho Alex Chuang, Justin Dianhuan Liou, J. Joseph Armstrong, Yujun Deng, John Fielden |
2018-08-07 |
| 10044166 |
CW DUV laser with improved stability |
Yung-Ho Alex Chuang, John Fielden |
2018-08-07 |
| 10032619 |
High brightness laser-sustained plasma broadband source |
Yung-Ho Alex Chuang, Justin Dianhuan Liou, John Fielden |
2018-07-24 |
| 9865447 |
High brightness laser-sustained plasma broadband source |
Yung-Ho Alex Chuang, Justin Dianhuan Liou, John Fielden |
2018-01-09 |
| 9525265 |
Laser repetition rate multiplier and flat-top beam profile generators using mirrors and/or prisms |
Yung-Ho Alex Chuang, Justin Dianhuan Liou, J. Joseph Armstrong, Yujun Deng, John Fielden |
2016-12-20 |
| 9509112 |
CW DUV laser with improved stability |
Yung-Ho Alex Chuang, John Fielden |
2016-11-29 |
| 9494531 |
Multi-spot illumination for improved detection sensitivity |
Yung-Ho Alex Chuang, John Fielden, Ivan Maleev |
2016-11-15 |