Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10495582 | System and method for reducing the bandwidth of a laser and an inspection system and method using a laser | Yung-Ho Alex Chuang, John Fielden | 2019-12-03 |
| 10439355 | 193nm laser and inspection system | Yung-Ho Alex Chuang, J. Joseph Armstrong, Justin Dianhuan Liou, Vladimir Dribinski, John Fielden | 2019-10-08 |
| 10199149 | 183NM laser and inspection system | Yung-Ho Alex Chuang, J. Joseph Armstrong, Vladimir Dribinski, John Fielden, Jidong Zhang | 2019-02-05 |
| 10044164 | Laser repetition rate multiplier and flat-top beam profile generators using mirrors and/or prisms | Yung-Ho Alex Chuang, Xiaoxu Lu, Justin Dianhuan Liou, J. Joseph Armstrong, John Fielden | 2018-08-07 |
| 10014652 | Broadly tunable optical parametric oscillator | James D. Kafka, James B. Clark, Ching-Yuan Chien, Andrei C. Florean, David E. Spence | 2018-07-03 |
| 9935421 | 193nm laser and inspection system | Yung-Ho Alex Chuang, J. Joseph Armstrong, Justin Dianhuan Liou, Vladimir Dribinski, John Fielden | 2018-04-03 |
| 9804101 | System and method for reducing the bandwidth of a laser and an inspection system and method using a laser | Yung-Ho Alex Chuang, John Fielden | 2017-10-31 |
| 9768577 | Semiconductor inspection and metrology system using laser pulse multiplier | Yung-Ho Alex Chuang, Justin Dianhuan Liou, J. Joseph Armstrong | 2017-09-19 |
| 9748729 | 183NM laser and inspection system | Yung-Ho Alex Chuang, J. Joseph Armstrong, Vladimir Dribinski, John Fielden, Jidong Zhang | 2017-08-29 |
| 9529182 | 193nm laser and inspection system | Yung-Ho Alex Chuang, J. Joseph Armstrong, Justin Dianhuan Liou, Vladimir Dribinski, John Fielden | 2016-12-27 |
| 9525265 | Laser repetition rate multiplier and flat-top beam profile generators using mirrors and/or prisms | Yung-Ho Alex Chuang, Xiaoxu Lu, Justin Dianhuan Liou, J. Joseph Armstrong, John Fielden | 2016-12-20 |
| 9419407 | Laser assembly and inspection system using monolithic bandwidth narrowing apparatus | J. Joseph Armstrong, Yung-Ho Alex Chuang, Vladimir Dribinski, John Fielden | 2016-08-16 |
| 9318869 | 193nm laser and inspection system | Yung-Ho Alex Chuang, J. Joseph Armstrong, Vladimir Dribinski, John Fielden | 2016-04-19 |
| 9151940 | Semiconductor inspection and metrology system using laser pulse multiplier | Yung-Ho Alex Chuang, Justin Dianhuan Liou, J. Joseph Armstrong | 2015-10-06 |
| 8929406 | 193NM laser and inspection system | Yung-Ho Alex Chuang, J. Joseph Armstrong, Vladimir Dribinski, John Fielden | 2015-01-06 |
| 8902939 | Broadly tunable optical parametric oscillator | James D. Kafka, Ching-Yuan Chien, Andrei C. Florean, David E. Spence, Jianping Zhou | 2014-12-02 |