Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10439355 | 193nm laser and inspection system | Yung-Ho Alex Chuang, J. Joseph Armstrong, Yujun Deng, Vladimir Dribinski, John Fielden | 2019-10-08 |
| 10193293 | Semiconductor inspection and metrology system using laser pulse multiplier | Yung-Ho Alex Chuang, J. Joseph Armstrong, Vladimir Dribinski, David L. Brown | 2019-01-29 |
| 10044164 | Laser repetition rate multiplier and flat-top beam profile generators using mirrors and/or prisms | Yung-Ho Alex Chuang, Xiaoxu Lu, J. Joseph Armstrong, Yujun Deng, John Fielden | 2018-08-07 |
| 10032619 | High brightness laser-sustained plasma broadband source | Yung-Ho Alex Chuang, Xiaoxu Lu, John Fielden | 2018-07-24 |
| 9972959 | Semiconductor inspection and metrology system using laser pulse multiplier | Yung-Ho Alex Chuang, J. Joseph Armstrong, Vladimir Dribinski, David L. Brown | 2018-05-15 |
| 9935421 | 193nm laser and inspection system | Yung-Ho Alex Chuang, J. Joseph Armstrong, Yujun Deng, Vladimir Dribinski, John Fielden | 2018-04-03 |
| 9865447 | High brightness laser-sustained plasma broadband source | Yung-Ho Alex Chuang, Xiaoxu Lu, John Fielden | 2018-01-09 |
| 9793673 | Semiconductor inspection and metrology system using laser pulse multiplier | Yung-Ho Alex Chuang, J. Joseph Armstrong, Vladimir Dribinski, David L. Brown | 2017-10-17 |
| 9768577 | Semiconductor inspection and metrology system using laser pulse multiplier | Yung-Ho Alex Chuang, J. Joseph Armstrong, Yujun Deng | 2017-09-19 |
| 9608399 | 193 nm laser and an inspection system using a 193 nm laser | Yung-Ho Alex Chuang, J. Joseph Armstrong, Vladimir Dribinski, John Fielden | 2017-03-28 |
| 9529182 | 193nm laser and inspection system | Yung-Ho Alex Chuang, J. Joseph Armstrong, Yujun Deng, Vladimir Dribinski, John Fielden | 2016-12-27 |
| 9525265 | Laser repetition rate multiplier and flat-top beam profile generators using mirrors and/or prisms | Yung-Ho Alex Chuang, Xiaoxu Lu, J. Joseph Armstrong, Yujun Deng, John Fielden | 2016-12-20 |
| 9151940 | Semiconductor inspection and metrology system using laser pulse multiplier | Yung-Ho Alex Chuang, J. Joseph Armstrong, Yujun Deng | 2015-10-06 |