Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9891177 | TDI sensor in a darkfield system | Guoheng Zhao, Daniel Kavaldjiev, Anatoly Romanovsky, Ivan Maleev, Christian Wolters +5 more | 2018-02-13 |
| 9678350 | Laser with integrated multi line or scanning beam capability | Christian Wolters, Dirk Woll, Anatoly Romanovsky, Bret Whiteside, Stephen Biellak +1 more | 2017-06-13 |
| 9182358 | Multi-spot defect inspection system | Zhiwei Xu, Christian Wolters, Juergen Reich, Bret Whiteside, Guoheng Zhao +3 more | 2015-11-10 |