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Reflective waveplates for pupil polarization filtering |
Chong SHEN, Guoheng Zhao |
2025-06-03 |
| 11733172 |
Apparatus and method for rotating an optical objective |
Anatoly Romanovsky, Jenn-Kuen Leong, Daniel Kavaldjiev, Chunhai Wang, Zhiwei Xu |
2023-08-22 |
| 11366307 |
Programmable and reconfigurable mask with MEMS micro-mirror array for defect detection |
Hongxing Yuan, Tim Mahatdejkul |
2022-06-21 |
| 11181484 |
Systems and methods for advanced defect ablation protection |
Zhiwei Xu, Steve Cui, Stephen Biellak |
2021-11-23 |
| 10324045 |
Surface defect inspection with large particle monitoring and laser power control |
Steve (Yifeng) Cui, Chunsheng Huang, Chunhai Wang, Christian Wolters, Anatoly Romanovsky +2 more |
2019-06-18 |
| 10215712 |
Method and apparatus for producing and measuring dynamically focused, steered, and shaped oblique laser illumination for spinning wafer inspection system |
Christian Wolters, Anatoly Romanovsky |
2019-02-26 |
| 9891177 |
TDI sensor in a darkfield system |
Jijen Vazhaeparambil, Guoheng Zhao, Daniel Kavaldjiev, Anatoly Romanovsky, Ivan Maleev +5 more |
2018-02-13 |
| 9678350 |
Laser with integrated multi line or scanning beam capability |
Christian Wolters, Jijen Vazhaeparambil, Dirk Woll, Anatoly Romanovsky, Stephen Biellak +1 more |
2017-06-13 |
| 9664909 |
Monolithic optical beam splitter with focusing lens |
Patrick J. Czarnota, Juergen Reich, Sam Shamouilian |
2017-05-30 |
| 9182358 |
Multi-spot defect inspection system |
Zhiwei Xu, Christian Wolters, Juergen Reich, Guoheng Zhao, Jijen Vazhaeparambil +3 more |
2015-11-10 |
| 9068952 |
Method and apparatus for producing and measuring dynamically focussed, steered, and shaped oblique laser illumination for spinning wafer inspection system |
Aleksey Petrenko, Christian Wolters, Zhongping Cai, Anatoly Romanovsky |
2015-06-30 |
| 8934091 |
Monitoring incident beam position in a wafer inspection system |
Juergen Reich, Aleksey Petrenko, Richard Fong, Jien Cao, Christian Wolters +2 more |
2015-01-13 |
| 8432944 |
Extending the lifetime of a deep UV laser in a wafer inspection tool |
Anatoly Romanovsky, George Kren |
2013-04-30 |
| 8134698 |
Dynamic range extension in surface inspection systems |
Christian Wolters, Anatoly Romanovsky, Daniel Kavaldjiev |
2012-03-13 |