Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10809055 | Apparatus and method for measuring topography and gradient of the surfaces, shape, and thickness of patterned and unpatterned wafers | — | 2020-10-20 |
| 10732424 | Inspection-beam shaping on a sample surface at an oblique angle of incidence | Zhiwei Xu, Qing Li | 2020-08-04 |
| 10324045 | Surface defect inspection with large particle monitoring and laser power control | Steve (Yifeng) Cui, Chunhai Wang, Christian Wolters, Bret Whiteside, Anatoly Romanovsky +2 more | 2019-06-18 |
| 9903708 | Method and apparatus to fold optics in tools for measuring shape and/or thickness of a large and thin substrate | Chunhai Wang, Andrew An Zeng, Frederick Arnold Goodman, Shouhong Tang, Yi Zhang | 2018-02-27 |
| 9279663 | Method and apparatus to fold optics in tools for measuring shape and/or thickness of a large and thin substrate | Chunhai Wang, Andrew Zeng, Frederick Arnold Goodman, Shouhong Tang, Yi Zhang | 2016-03-08 |
| D580435 | External hard disk drive | Xianyong Gu | 2008-11-11 |
| 7433034 | Darkfield defect inspection with spectral contents | — | 2008-10-07 |
| 7061613 | Polarizing beam splitter and dual detector calibration of metrology device having a spatial phase modulation | Pablo I. Rovira, Jaime Poris | 2006-06-13 |
| 5416586 | Method of testing aspherical optical surfaces with an interferometer | Mark Joseph Tronolone, Jon Fleig, John H. Bruning | 1995-05-16 |
| 5349434 | Method of measuring artifact taper | Jon Fleig, Mark Joseph Tronolone | 1994-09-20 |