Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9903708 | Method and apparatus to fold optics in tools for measuring shape and/or thickness of a large and thin substrate | Chunhai Wang, Chunsheng Huang, Frederick Arnold Goodman, Shouhong Tang, Yi Zhang | 2018-02-27 |
| 9163928 | Reducing registration error of front and back wafer surfaces utilizing a see-through calibration wafer | Shouhong Tang, Chunhai Wang | 2015-10-20 |