Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10352691 | Systems and methods for wafer structure uniformity monitoring using interferometry wafer geometry tool | Haiguang Chen, Jaydeep Sinha, Sergey Kamensky | 2019-07-16 |
| 9903708 | Method and apparatus to fold optics in tools for measuring shape and/or thickness of a large and thin substrate | Chunhai Wang, Chunsheng Huang, Andrew An Zeng, Frederick Arnold Goodman, Yi Zhang | 2018-02-27 |
| 9702829 | Systems and methods for wafer surface feature detection and quantification | Haiguang Chen, Jaydeep Sinha, Sergey Kamensky, Enrique Chavez, Mark Plemmons | 2017-07-11 |
| 9279663 | Method and apparatus to fold optics in tools for measuring shape and/or thickness of a large and thin substrate | Chunhai Wang, Chunsheng Huang, Andrew Zeng, Frederick Arnold Goodman, Yi Zhang | 2016-03-08 |
| 9163928 | Reducing registration error of front and back wafer surfaces utilizing a see-through calibration wafer | Chunhai Wang, Andrew An Zeng | 2015-10-20 |
| 9121684 | Method for reducing wafer shape and thickness measurement errors resulted from cavity shape changes | Andrew Zeng, Yi Zhang, Jie Zheng | 2015-09-01 |
| 9074873 | Measurement of thickness variation and shape of wafers | — | 2015-07-07 |
| 9019491 | Method and apparatus for measuring shape and thickness variation of a wafer | — | 2015-04-28 |
| 8949057 | Method for compensating for wafer shape measurement variation due to variation of environment temperature | Kibyung Seong | 2015-02-03 |
| 8630479 | Methods and systems for improved localized feature quantification in surface metrology tools | Haiguang Chen, Jaydeep Sinha, John Hager, Andrew Zeng, Sergey Kamensky | 2014-01-14 |
| 8621945 | Method and apparatus for improving the temperature stability and minimizing the noise of the environment that encloses an interferometric measuring system | An Andrew Zeng, Steve Cui | 2014-01-07 |
| 8537369 | Method and apparatus for measuring the shape and thickness variation of a wafer by two single-shot phase-shifting interferometers | — | 2013-09-17 |
| 8068234 | Method and apparatus for measuring shape or thickness information of a substrate | George Kren, Dieter Mueller, Brian Haas, Daniel Kavaldjiev | 2011-11-29 |
| 7847954 | Measuring the shape and thickness variation of a wafer with high slopes | Romain Sappey | 2010-12-07 |
| 7667852 | Measuring the shape, thickness variation, and material inhomogeneity of a wafer | — | 2010-02-23 |
| 7595891 | Measurement of the top surface of an object with/without transparent thin films in white light interferometry | — | 2009-09-29 |
| 7583386 | Method and apparatus for optically analyzing a surface | Klaus Freischlad | 2009-09-01 |
| 7538887 | Temporal interferometric signal modeling with constant phase shift in white light interferometry | — | 2009-05-26 |
| 7428056 | Method and apparatus for optically analyzing a surface | Klaus Freischlad | 2008-09-23 |
| 7408649 | Method and apparatus for optically analyzing a surface | Klaus Freischlad | 2008-08-05 |
| 6885461 | Weighted least-square interferometric measurement of multiple surfaces | — | 2005-04-26 |
| 6856405 | Non linear phase shift calibration for interferometric measurement of multiple surfaces | — | 2005-02-15 |
| 6847458 | Method and apparatus for measuring the shape and thickness variation of polished opaque plates | Klaus Freischlad | 2005-01-25 |
| 5471307 | Sheet flatness measurement system and method | Chris L. Koliopoulos | 1995-11-28 |