Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8045175 | Equal-path interferometer | Peter De Groot, Leslie L. Deck, James F. Biegen | 2011-10-25 |
| 7839495 | System and method for controlling a beam source in a workpiece surface inspection system | Bruce Baran, Songping Gao, Richard E. Bills, Michael Murphree | 2010-11-23 |
| 7557910 | System and method for controlling a beam source in a workpiece surface inspection system | Bruce Baran, Songping Gao, Richard E. Bills, Michael Murphree | 2009-07-07 |
| 7541826 | Compliant pad wafer chuck | Matthew R. Boston | 2009-06-02 |
| 7324917 | Method, system, and software for evaluating characteristics of a surface with reference to its edge | Jaydeep Sinha, Delvin A. Lindley, John F. Valley, Noel S. Poduje | 2008-01-29 |
| 6304325 | Variable shear A. C. interferometer | John W. Hardy, Joseph E. Lefebvre | 2001-10-16 |
| 5471307 | Sheet flatness measurement system and method | Shouhong Tang | 1995-11-28 |