Issued Patents All Time
Showing 25 most recent of 59 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12305980 | Optical contact metrology | — | 2025-05-20 |
| 10962348 | Method and apparatus for optimizing the optical performance of interferometers | — | 2021-03-30 |
| 10890428 | Interferometric method and apparatus using calibration information relating a focus setting to a test object position | — | 2021-01-12 |
| 10845251 | Wavemeter using pairs of interferometric optical cavities | — | 2020-11-24 |
| 10591284 | Metrology of multi-layer stacks | Peter De Groot | 2020-03-17 |
| 10451413 | Surface topography apparatus and method | Peter De Groot | 2019-10-22 |
| 10267617 | Method and apparatus for optimizing the optical performance of interferometers | — | 2019-04-23 |
| 10190871 | Precision positioning system using a wavelength tunable laser | — | 2019-01-29 |
| 9891078 | Interferometric encoders using spectral analysis | Jan Liesener | 2018-02-13 |
| 9115975 | Position monitoring system with reduced noise | Jan Liesener, Robert M. Carangelo, Michael Lowell Holmes, Alexander David Wesley | 2015-08-25 |
| 8988690 | Interferometric encoder systems | Peter De Groot, Michael D. Schroeder | 2015-03-24 |
| 8902431 | Low coherence interferometry with scan error correction | Jan Liesener, Mark Davidson, Peter De Groot, Xavier Colonna de Lega | 2014-12-02 |
| 8670127 | Interferometric encoder systems | Peter De Groot, Michael D. Schroeder | 2014-03-11 |
| 8379218 | Fiber-based interferometer system for monitoring an imaging interferometer | Peter De Groot, Mark Davidson, Jan Liesener, Xavier Colonna De Lega | 2013-02-19 |
| 8300233 | Interferometric encoder systems | Peter De Groot, Michael D. Schroeder | 2012-10-30 |
| 8120781 | Interferometric systems and methods featuring spectral analysis of unevenly sampled data | Jan Liesener, Mark Davidson, Peter De Groot, Xavier Colonna de Lega | 2012-02-21 |
| 8045175 | Equal-path interferometer | Peter De Groot, James F. Biegen, Chris L. Koliopoulos | 2011-10-25 |
| 8004688 | Scan error correction in low coherence scanning interferometry | Mark Davidson, Jan Liesener, Peter De Groot, Xavier Colonna de Lega | 2011-08-23 |
| 7978338 | Compound reference interferometer | Peter De Groot, Mark Davidson, Jan Liesener, Xavier Colonna De Lega | 2011-07-12 |
| 7948639 | Phase-shifting interferometry in the presence of vibration | — | 2011-05-24 |
| 7826064 | Interferometer system for monitoring an object | Peter De Groot, Carl A. Zanoni | 2010-11-02 |
| 7796275 | Phase-shifting interferometry in the presence of vibration using phase bias | — | 2010-09-14 |
| 7796273 | Phase-shifting interferometry in the presence of vibration | — | 2010-09-14 |
| 7710580 | Vibration resistant interferometry | — | 2010-05-04 |
| 7639367 | Interferometer system for monitoring an object | Peter Groot, Carl A. Zanoni | 2009-12-29 |