| 7826064 |
Interferometer system for monitoring an object |
Peter De Groot, Leslie L. Deck |
2010-11-02 |
| 7639367 |
Interferometer system for monitoring an object |
Peter Groot, Leslie L. Deck |
2009-12-29 |
| 7636166 |
Interferometer system for monitoring an object |
Peter De Groot, Leslie L. Deck |
2009-12-22 |
| 6876452 |
Apparatus and methods for high accuracy metrology and positioning of a body |
Christopher J. Evans |
2005-04-05 |
| 6816267 |
Apparatus and method for calibrating an interferometer using a selectively rotatable sphere |
Christopher J. Evans, Michael Kuchel |
2004-11-09 |
| 6771375 |
Apparatus and method for measuring aspherical optical surfaces and wavefronts |
— |
2004-08-03 |
| 6724486 |
Helium- Neon laser light source generating two harmonically related, single- frequency wavelengths for use in displacement and dispersion measuring interferometry |
William A. Shull |
2004-04-20 |
| 6643024 |
Apparatus and method(s) for reducing the effects of coherent artifacts in an interferometer |
Leslie L. Deck, David Stephenson, Edward J Gratix |
2003-11-04 |
| 6181420 |
Interferometry system having reduced cyclic errors |
Vivek G. Badami, Steven R. Patterson |
2001-01-30 |
| 5724136 |
Interferometric apparatus for measuring motions of a stage relative to fixed reflectors |
— |
1998-03-03 |
| 4883357 |
Dual high stability interferometer |
Alan H. Field |
1989-11-28 |
| 4881816 |
Linear and angular displacement measuring interferometer |
— |
1989-11-21 |