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Cyclic error compensation in interferometry systems |
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2009-11-10 |
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Touch simulation system and method |
Bernard O. Geaghan, Gordon F. Taylor |
2008-04-22 |
| 6163163 |
Semiconductor material characterizing method and apparatus |
Charles M. Kohn, Martin Rommel, Sergey Liberman, Peter L. Domenicali, Glendon P. Marston |
2000-12-19 |
| 6097205 |
Method and apparatus for characterizing a specimen of semiconductor material |
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2000-08-01 |
| 6034535 |
Method utilizing a modulated light beam for determining characteristics such as the doping concentration profile of a specimen of semiconductor material |
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| 5249030 |
Method and apparatus for determining the position of a moving body and the time of the position measurement |
Joseph Bakach |
1993-09-28 |
| 4883357 |
Dual high stability interferometer |
Carl A. Zanoni |
1989-11-28 |
| 4765741 |
Wavelength tracking compensator for an interferometer |
Scott M. Detro |
1988-08-23 |
