Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6163163 | Semiconductor material characterizing method and apparatus | Martin Rommel, Sergey Liberman, Peter L. Domenicali, Alan H. Field, Glendon P. Marston | 2000-12-19 |
| 6097205 | Method and apparatus for characterizing a specimen of semiconductor material | Sergey Liberman, Peter L. Domenicali, Alan H. Field, Glendon P. Marston | 2000-08-01 |
| 6034535 | Method utilizing a modulated light beam for determining characteristics such as the doping concentration profile of a specimen of semiconductor material | Sergey Liberman, Peter L. Domenicali, Alan H. Field, Glendon P. Marston | 2000-03-07 |