| 7948638 |
Scanning interferometric methods and apparatus for measuring aspheric surfaces and wavefronts |
— |
2011-05-24 |
| 7889356 |
Two grating lateral shearing wavefront sensor |
— |
2011-02-15 |
| 7612893 |
Scanning interferometric methods and apparatus for measuring aspheric surfaces and wavefronts |
— |
2009-11-03 |
| 7289224 |
Low coherence grazing incidence interferometry for profiling and tilt sensing |
Xavier Colonna De Lega, Peter De Groot |
2007-10-30 |
| 7218403 |
Scanning interferometer for aspheric surfaces and wavefronts |
— |
2007-05-15 |
| 6972849 |
Scanning interferometer for aspheric surfaces and wavefronts |
— |
2005-12-06 |
| 6943896 |
Reconfigurable interferometer system |
— |
2005-09-13 |
| 6879402 |
Scanning interferometer for aspheric surfaces and wavefronts |
— |
2005-04-12 |
| 6816267 |
Apparatus and method for calibrating an interferometer using a selectively rotatable sphere |
Christopher J. Evans, Carl A. Zanoni |
2004-11-09 |
| 6781700 |
Scanning interferometer for aspheric surfaces and wavefronts |
— |
2004-08-24 |
| 6734979 |
Rapid in situ mastering of an aspheric Fizeau with residual error compensation |
Christopher J. Evans |
2004-05-11 |
| 6717680 |
Apparatus and method for phase-shifting interferometry |
Leslie L. Deck |
2004-04-06 |
| 6717679 |
Dispersive null-optics for aspheric surface and wavefront metrology |
— |
2004-04-06 |
| 6714308 |
Rapid in-situ mastering of an aspheric fizeau |
Christopher J. Evans |
2004-03-30 |
| 5361312 |
Method and apparatus for phase evaluation of pattern images used in optical measurement |
— |
1994-11-01 |
| 5357341 |
Method for evaluating interferograms and interferometer therefor |
Karl-Heinz Schuster, Klaus Freischlad |
1994-10-18 |
| 5343294 |
Method for analyzing periodic brightness patterns |
Albrecht Hof |
1994-08-30 |
| 5135308 |
Method and apparatus for non-contact measuring of object surfaces |
— |
1992-08-04 |
| 5135309 |
Method and apparatus for non-contact measuring of object surfaces |
Albrecht Hof |
1992-08-04 |
| 5106194 |
Method and apparatus for absolute interferometric testing of plane surfaces |
— |
1992-04-21 |
| 5054912 |
Optical distance-measuring device |
— |
1991-10-08 |
| 5042041 |
Radiation source for partially coherent radiation |
Uwe Vry, Klaus Freischlad, Andreas Dorsel |
1991-08-20 |
| 4872755 |
Interferometer for measuring optical phase differences |
— |
1989-10-10 |