Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12292274 | Interferometric lens aligner and method | Paul A. Townley-Smith | 2025-05-06 |
| 10066974 | Interferometric encoder systems having at least partially overlapping diffracted beams | — | 2018-09-04 |
| 9891078 | Interferometric encoders using spectral analysis | Leslie L. Deck | 2018-02-13 |
| 9798130 | Measuring topography of aspheric and other non-flat surfaces | Thomas Dresel, Peter De Groot | 2017-10-24 |
| 9746348 | Double pass interferometric encoder system | Peter De Groot | 2017-08-29 |
| 9719777 | Interferometer with real-time fringe-free imaging | Xavier Colonna de Lega | 2017-08-01 |
| 9201313 | Compact encoder head for interferometric encoder system | — | 2015-12-01 |
| 9115975 | Position monitoring system with reduced noise | Robert M. Carangelo, Leslie L. Deck, Michael Lowell Holmes, Alexander David Wesley | 2015-08-25 |
| 9025161 | Double pass interferometric encoder system | Peter De Groot | 2015-05-05 |
| 8902431 | Low coherence interferometry with scan error correction | Mark Davidson, Peter De Groot, Xavier Colonna de Lega, Leslie L. Deck | 2014-12-02 |
| 8854628 | Interferometric methods for metrology of surfaces, films and underresolved structures | Xavier Colonna de Lega, Peter De Groot | 2014-10-07 |
| 8456644 | Measurement of changes in surfaces of objects | Christopher J. Evans, John F. Filhaber, Vivek G. Badami | 2013-06-04 |
| 8379218 | Fiber-based interferometer system for monitoring an imaging interferometer | Leslie L. Deck, Peter De Groot, Mark Davidson, Xavier Colonna De Lega | 2013-02-19 |
| 8248617 | Interferometer for overlay measurements | Peter De Groot, Xavier Colonna De Lega | 2012-08-21 |
| 8189202 | Interferometer for determining overlay errors | Xavier Colonna De Lega, Peter De Groot | 2012-05-29 |
| 8120781 | Interferometric systems and methods featuring spectral analysis of unevenly sampled data | Mark Davidson, Peter De Groot, Xavier Colonna de Lega, Leslie L. Deck | 2012-02-21 |
| 8004688 | Scan error correction in low coherence scanning interferometry | Mark Davidson, Peter De Groot, Xavier Colonna de Lega, Leslie L. Deck | 2011-08-23 |
| 7978338 | Compound reference interferometer | Peter De Groot, Mark Davidson, Xavier Colonna De Lega, Leslie L. Deck | 2011-07-12 |
| 7751064 | Interference objective for annular test surfaces | James F. Biegen | 2010-07-06 |