| 12292274 |
Interferometric lens aligner and method |
Paul A. Townley-Smith |
2025-05-06 |
| 10066974 |
Interferometric encoder systems having at least partially overlapping diffracted beams |
— |
2018-09-04 |
| 9891078 |
Interferometric encoders using spectral analysis |
Leslie L. Deck |
2018-02-13 |
| 9798130 |
Measuring topography of aspheric and other non-flat surfaces |
Thomas Dresel, Peter De Groot |
2017-10-24 |
| 9746348 |
Double pass interferometric encoder system |
Peter De Groot |
2017-08-29 |
| 9719777 |
Interferometer with real-time fringe-free imaging |
Xavier Colonna de Lega |
2017-08-01 |
| 9201313 |
Compact encoder head for interferometric encoder system |
— |
2015-12-01 |
| 9115975 |
Position monitoring system with reduced noise |
Robert M. Carangelo, Leslie L. Deck, Michael Lowell Holmes, Alexander David Wesley |
2015-08-25 |
| 9025161 |
Double pass interferometric encoder system |
Peter De Groot |
2015-05-05 |
| 8902431 |
Low coherence interferometry with scan error correction |
Mark Davidson, Peter De Groot, Xavier Colonna de Lega, Leslie L. Deck |
2014-12-02 |
| 8854628 |
Interferometric methods for metrology of surfaces, films and underresolved structures |
Xavier Colonna de Lega, Peter De Groot |
2014-10-07 |
| 8456644 |
Measurement of changes in surfaces of objects |
Christopher J. Evans, John F. Filhaber, Vivek G. Badami |
2013-06-04 |
| 8379218 |
Fiber-based interferometer system for monitoring an imaging interferometer |
Leslie L. Deck, Peter De Groot, Mark Davidson, Xavier Colonna De Lega |
2013-02-19 |
| 8248617 |
Interferometer for overlay measurements |
Peter De Groot, Xavier Colonna De Lega |
2012-08-21 |
| 8189202 |
Interferometer for determining overlay errors |
Xavier Colonna De Lega, Peter De Groot |
2012-05-29 |
| 8120781 |
Interferometric systems and methods featuring spectral analysis of unevenly sampled data |
Mark Davidson, Peter De Groot, Xavier Colonna de Lega, Leslie L. Deck |
2012-02-21 |
| 8004688 |
Scan error correction in low coherence scanning interferometry |
Mark Davidson, Peter De Groot, Xavier Colonna de Lega, Leslie L. Deck |
2011-08-23 |
| 7978338 |
Compound reference interferometer |
Peter De Groot, Mark Davidson, Xavier Colonna De Lega, Leslie L. Deck |
2011-07-12 |
| 7751064 |
Interference objective for annular test surfaces |
James F. Biegen |
2010-07-06 |