Issued Patents All Time
Showing 1–25 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12024665 | Polymer-stabilized liquid crystal composition and use thereof | Maoxian CHEN, Shihong Chu, Tianmeng Jiang, Xin WEI | 2024-07-02 |
| 11761880 | Process-induced distortion prediction and feedforward and feedback correction of overlay errors | Pradeep Vukkadala, Jaydeep Sinha, Sathish Veeraraghavan | 2023-09-19 |
| 10655064 | Liquid crystal composition and its application | Tianmeng Jiang, Huiqiang Tian, Shihong Chu, Lilong Gao, Quanzhi Ban +1 more | 2020-05-19 |
| 10557082 | Liquid crystal composition and application thereof | Maoxian CHEN, Shihong Chu, Tianmeng Jiang, Xin WEI, Lin Zhang +5 more | 2020-02-11 |
| 10414981 | Liquid crystal composition containing 2-methyl-3,4,5-trifluorobenzene liquid crystal compound and application thereof | Maoxian CHEN, Shihong Chu, Xin WEI, Xinying WANG, Tianmeng Jiang +6 more | 2019-09-17 |
| 10401279 | Process-induced distortion prediction and feedforward and feedback correction of overlay errors | Pradeep Vukkadala, Jaydeep Sinha, Sathish Veeraraghavan | 2019-09-03 |
| 10379061 | Systems, methods and metrics for wafer high order shape characterization and wafer classification using wafer dimensional geometry tool | Jaydeep Sinha, Sergey Kamensky, Sathish Veeraraghavan, Pradeep Vukkadala | 2019-08-13 |
| 10352691 | Systems and methods for wafer structure uniformity monitoring using interferometry wafer geometry tool | Jaydeep Sinha, Shouhong Tang, Sergey Kamensky | 2019-07-16 |
| 10330608 | Systems and methods for wafer surface feature detection, classification and quantification with wafer geometry metrology tools | Jaydeep Sinha, Sergey Kamensky | 2019-06-25 |
| 10025894 | System and method to emulate finite element model based prediction of in-plane distortions due to semiconductor wafer chucking | Pradeep Vukkadala, Sathish Veeraraghavan, Jaydeep Sinha, Michael D. Kirk | 2018-07-17 |
| 9865047 | Systems and methods for effective pattern wafer surface measurement and analysis using interferometry tool | Jaydeep Sinha, Enrique Chavez, Sathish Veeraraghavan | 2018-01-09 |
| 9702829 | Systems and methods for wafer surface feature detection and quantification | Jaydeep Sinha, Sergey Kamensky, Enrique Chavez, Shouhong Tang, Mark Plemmons | 2017-07-11 |
| 9646379 | Detection of selected defects in relatively noisy inspection data | Michael D. Kirk, Stephen Biellak, Jaydeep Sinha | 2017-05-09 |
| 9632038 | Hybrid phase unwrapping systems and methods for patterned wafer measurement | Jaydeep Sinha | 2017-04-25 |
| 9546862 | Systems, methods and metrics for wafer high order shape characterization and wafer classification using wafer dimensional geometry tool | Jaydeep Sinha, Sergey Kamensky, Sathish Veeraraghavan, Pradeep Vukkadala | 2017-01-17 |
| 9430593 | System and method to emulate finite element model based prediction of in-plane distortions due to semiconductor wafer chucking | Pradeep Vukkadala, Sathish Veeraraghavan, Jaydeep Sinha, Michael D. Kirk | 2016-08-30 |
| 9355440 | Detection of selected defects in relatively noisy inspection data | Michael D. Kirk, Stephen Biellak, Jaydeep Sinha | 2016-05-31 |
| 9177370 | Systems and methods of advanced site-based nanotopography for wafer surface metrology | Sergey Kamensky, Jaydeep Sinha, Pradeep Vukkadala | 2015-11-03 |
| 9031810 | Methods and systems of object based metrology for advanced wafer surface nanotopography | Jaydeep Sinha, Sergey Kamensky | 2015-05-12 |
| 8831767 | Methods and systems for monitoring a parameter of a measurement device during polishing, damage to a specimen during polishing, or a characteristic of a polishing pad or tool | Kurt Lehman, Charles Chen, Ronald L. Allen, Robert Shinagawa, Anantha R. Sethuraman +3 more | 2014-09-09 |
| 8630479 | Methods and systems for improved localized feature quantification in surface metrology tools | Jaydeep Sinha, Shouhong Tang, John Hager, Andrew Zeng, Sergey Kamensky | 2014-01-14 |
| 8594975 | Systems and methods for wafer edge feature detection and quantification | Jaydeep Sinha | 2013-11-26 |
| 8494802 | Computer-implemented methods, computer-readable media, and systems for determining one or more characteristics of a wafer | Daniel Kavaldjiev, Louis Vintro, George Kren | 2013-07-23 |
| 8010222 | Methods and systems for monitoring a parameter of a measurement device during polishing, damage to a specimen during polishing, or a characteristic of a polishing pad or tool | Kurt Lehman, Charles Chen, Ronald L. Allen, Robert Shinagawa, Anantha R. Sethuraman +3 more | 2011-08-30 |
| 7711521 | Methods and systems for detection of selected defects particularly in relatively noisy inspection data | Sean F. Wu, Michael D. Kirk | 2010-05-04 |