Issued Patents All Time
Showing 1–25 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11733172 | Apparatus and method for rotating an optical objective | Anatoly Romanovsky, Jenn-Kuen Leong, Chunhai Wang, Bret Whiteside, Zhiwei Xu | 2023-08-22 |
| 11441893 | Multi-spot analysis system with multiple optical probes | Prasanna Dighe, Dieter Mueller, Dong Chen, Dengpeng Chen, Steve Zamek +1 more | 2022-09-13 |
| 11243175 | Sensitive particle detection with spatially-varying polarization rotator and polarizer | Xuefeng Liu, Jenn-Kuen Leong, John Fielden | 2022-02-08 |
| 10948423 | Sensitive particle detection with spatially-varying polarization rotator and polarizer | Xuefeng Liu, Jenn-Kuen Leong, John Fielden | 2021-03-16 |
| 10942135 | Radial polarizer for particle detection | Jenn-Kuen Leong, Guoheng Zhao | 2021-03-09 |
| 10739276 | Minimizing filed size to reduce unwanted stray light | Donald Pettibone, Chuanyong Huang, Qing Li, Frank Li, Zhiwei Xu | 2020-08-11 |
| 10488348 | Wafer inspection | Anatoly Romanovsky, Ivan Maleev, Yury Yuditsky, Dirk Woll, Stephen Biellak +2 more | 2019-11-26 |
| 10462391 | Dark-field inspection using a low-noise sensor | Yung-Ho Alex Chuang, David L. Brown, Devis Contarato, John Fielden, Guoheng Zhao +4 more | 2019-10-29 |
| 9915622 | Wafer inspection | Anatoly Romanovsky, Ivan Maleev, Yury Yuditsky, Dirk Woll, Stephen Biellak +2 more | 2018-03-13 |
| 9891177 | TDI sensor in a darkfield system | Jijen Vazhaeparambil, Guoheng Zhao, Anatoly Romanovsky, Ivan Maleev, Christian Wolters +5 more | 2018-02-13 |
| 9279774 | Wafer inspection | Anatoly Romanovsky, Ivan Maleev, Yury Yuditsky, Dirk Woll, Stephen Biellak +2 more | 2016-03-08 |
| 9273952 | Grazing and normal incidence interferometer having common reference surface | Dieter Mueller, Rainer Schierle | 2016-03-01 |
| 9086389 | Sample inspection system detector | Stephen Biellak, Guoheng Zhao, Mehdi Vaez-Iravani | 2015-07-21 |
| 8934091 | Monitoring incident beam position in a wafer inspection system | Juergen Reich, Aleksey Petrenko, Richard Fong, Bret Whiteside, Jien Cao +2 more | 2015-01-13 |
| 8786842 | Grazing and normal incidence interferometer having common reference surface | Dieter Muller, Rainer Schierle | 2014-07-22 |
| 8629384 | Photomultiplier tube optimized for surface inspection in the ultraviolet | Stephen Biellak, Stuart L. Friedman | 2014-01-14 |
| 8520208 | Segmented polarizer for optimizing performance of a surface inspection system | Stephen Biellak | 2013-08-27 |
| 8494802 | Computer-implemented methods, computer-readable media, and systems for determining one or more characteristics of a wafer | Haiguang Chen, Louis Vintro, George Kren | 2013-07-23 |
| 8294887 | Fast laser power control with improved reliability for surface inspection | Stephen Biellak, George Kren, Anatoly Romanovsky, Christian Wolters | 2012-10-23 |
| 8269960 | Computer-implemented methods for inspecting and/or classifying a wafer | Juergen Reich, Louis Vintro, Prasanna Dighe, Andrew J. Steinbach, Stephen Biellak | 2012-09-18 |
| 8169613 | Segmented polarizer for optimizing performance of a surface inspection system | Stephen Biellak | 2012-05-01 |
| 8134698 | Dynamic range extension in surface inspection systems | Christian Wolters, Anatoly Romanovsky, Bret Whiteside | 2012-03-13 |
| 8068234 | Method and apparatus for measuring shape or thickness information of a substrate | Shouhong Tang, George Kren, Dieter Mueller, Brian Haas | 2011-11-29 |
| 7912658 | Systems and methods for determining two or more characteristics of a wafer | Stephen Biellak | 2011-03-22 |
| 7663746 | Method and apparatus for scanning, stitching and damping measurements of a double sided metrology inspection tool | Paul Sullivan, Geroge Kren, Rodney Smedt, Hans J. Hansen, David W. Shortt +1 more | 2010-02-16 |