Issued Patents All Time
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7528944 | Methods and systems for detecting pinholes in a film formed on a wafer or for monitoring a thermal process tool | David K. Chen, Andrew J. Steinbach, Alexander Belyaev, Juergen Reich | 2009-05-05 |
| 7436506 | Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool | Paul Sullivan, George Kren, Rodney Smedt, Hans J. Hansen, David W. Shortt +1 more | 2008-10-14 |
| 7436505 | Computer-implemented methods and systems for determining a configuration for a light scattering inspection system | Alexander Belyaev, Amith Murali, Aleksey Petrenko, Mike Kirk, David W. Shortt +2 more | 2008-10-14 |
| 7173715 | Reduced coherence symmetric grazing incidence differential interferometer | Dieter Mueller, Rainer Schierle | 2007-02-06 |
| 7057741 | Reduced coherence symmetric grazing incidence differential interferometer | Dieter Mueller, Rainer Schierle | 2006-06-06 |
| 7009696 | Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool | Paul Sullivan, George Kren, Rodney Smedt, Hans J. Hansen, David W. Shortt +1 more | 2006-03-07 |
| 6686996 | Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool | Paul Sullivan, George Kren, Rodney Smedt, Hans J. Hansen, David W. Shortt +1 more | 2004-02-03 |
| 6414752 | Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool | Paul Sullivan, George Kren, Rodney Smedt, Hans J. Hansen, David W. Shortt +1 more | 2002-07-02 |